Long Scale Stage FS-3000/2000 Series
"Precision positioning device" - A stage with long stroke, high resolution, excellent positioning repeatability, and position holding capability after positioning!
This is a high-resolution long-stroke positioning stage equipped with an optical linear scale, which reduces detection errors. It has a stroke of "200mm," "300mm," or "400mm" with a resolution of "50nm" (*1) or "100nm" (*2). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. (*1) Combination with feedback stage controller FC-401 (*2) Combination with feedback stage controller FC-101
- 企業：シグマ光機
- 価格：Other
